Instead of surface sacrificial layer and bulk micromachining technique, using polymer as thermal isolation material decreases cost and improves yield.

以聚合物材料作为绝热材料，避免了表面牺牲层工艺和体加工技术，降低了成本、提高了成品率。

youdao

Instead of surface sacrificial layer and bulk micromachining technique, using polymer as thermal isolation material decreases cost and improves yield.

以聚合物材料作为绝热材料，避免了表面牺牲层工艺和体加工技术，降低了成本、提高了成品率。

youdao