The packaging process of vacuum reflowing soldering using in MEMS micro-gyro packaging was built and realized.

实现了MEMS微陀螺仪的真空封装工艺并优化了工艺参数；

youdao

The packaging process of vacuum reflowing soldering using in MEMS micro-gyro packaging was built and realized.

实现了MEMS微陀螺仪的真空封装工艺并优化了工艺参数；

youdao