This paper studies the work principle and structure of the rapid precision positioning system of 3D precision stage′s control system, and analyzes the system by theoretical and experimental methods.
对三维精密工作台快速定位系统的控制原理及结构组成进行了研究，并对系统进行理论和实验分析。
This paper studies the work principle and structure of the rapid precision positioning system of 3D precision stage′s control system, and analyzes the system by theoretical and experimental methods.
对三维精密工作台快速定位系统的控制原理及结构组成进行了研究，并对系统进行理论和实验分析。
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