The invention relates to an ion implanter (imp) comprising a pulsed plasma source (SPL), a substrate support plate (PPS) and a power supply (ALT) for said plate.
本发明涉及离子注入机imp，包括脉冲等离子体源spl、衬底支承台PPS和所述台的电源alt。
Using high - power pulsed laser - produced plasma as soft X - ray source for approach lithography is described in this paper.
描述了用高功率脉冲激光打靶产生的等离子体作为软x射线源而进行的接近式软x射线光刻研究。
Laser plasma soft X_ray source is a kind of pulsed light source. There are several diagnostic methods for this kind of light source.
激光等离子体软X射线光源是脉冲式光源，对这类光源的光谱诊断有几种方法。
Underwater plasma sound source, namely underwater sparker, is a significant application of pulsed discharge in water, which has been employed for underwater acoustics and sea oil prospecting.
水下等离子体声源是水中脉冲放电技术在水下声学和地震勘探技术方面的一个重要应用，又称为电火花震源。
The plasma source ion implantation device consists of pulsed negative high voltage power, hot cathode arc discharge system, vacuum chamber and target stage, vacuum system and monitor system.
等离子体源离子注入装置由脉冲负高压源系统、热阴极弧放电系统、真空室及样品台、真空系统和监测系统等五部分组成。
A dye laser system used as a pulsed light source for picosecond photography of laser-produced plasma is described.
本文叙述了作为激光等离子体微微秒照相脉冲光源用的染料激光系统。
A dye laser system used as a pulsed light source for picosecond photography of laser-produced plasma is described.
本文叙述了作为激光等离子体微微秒照相脉冲光源用的染料激光系统。
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