If a wing falls off an airplane, the forensic engineers will look first at where the wing attaches to the airplane: in physical systems, proximity of error to function is frequently high.
如果一个机翼脱落了，工程师首先会查看机翼连接的位置：在物理系统上，错误和功能的临近度通常很高。
To give an error analysis of this effect, the propagation of partial coherent light in the proximity UV-lithography was investigated and the relative theoretical model was proposed.
为此，研究了接近式紫外光刻中部分相干光的传播过程，建立了相应的光刻理论模型，对光刻成像中的误差产生机理进行分析。
To give an error analysis of this effect, the propagation of partial coherent light in the proximity UV-lithography was investigated and the relative theoretical model was proposed.
为此，研究了接近式紫外光刻中部分相干光的传播过程，建立了相应的光刻理论模型，对光刻成像中的误差产生机理进行分析。
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