The proximity effect in the E-beam lithography system was verified by experiments.
利用电子束曝光机完成有关邻近效应的实验。
The proximity effect in the SDS-3 E-beam lithography system is verified by experiments.
利用SDS - 3电子束曝光机完成有关邻近效应的试验。
Many different schemes have been devised to minimize the proximity effect, such as pattern size correction and dose modulation.
有多种方法对邻近效应进行修正如剂量调整、图形调整等。
The experiment results show that the method is effective to devise complex phase? Shifting masks and the proximity effect is decreased.
实验结果表明该方法对复杂相移掩模的设计有效,可以减小邻近效应。
By Fourier transform, produces a fast and accurate calculation for dose precompensation in proximity effect correction for electron beam lithography.
将付里叶变换法运用于电子束曝光的邻近效应校正中,形成了快速、准确的剂量校正法。
Piezoresistivity of ecac may involve proximity effect, microcrack and the staggered arrangements of conductive pass-ways due to shear strength of aggregates.
压敏产生的原因是导电沥青混凝土试件的压缩邻近效应、微裂纹和石料间的剪切力使部分导电通路错位。
The present results not only can help to optimize the exposure conditions in Electron Beam Lithography, but also supply more accurate data for proximity effect correction.
本文的模拟结果不仅能为高能电子束光刻工艺优化曝光条件、降低邻近效应提供理论指导,而且能为进一步的邻近效应的校正提供更精确的数据。
Furthermore, the parameters acquired by this method are successfully used for proximity effect correction in electron beam lithography on the same experimental conditions.
此外,用此方法提取的电子散射参数被成功地用于相同实验条件下的电子束临近效应校正。
Ac resistance of cable conductor is an important factor to calculate the ampacity of cable bundles, and proximity effect factor is an important parameter to affect ac resistance.
在计算电缆群载流量时,交流电阻是一个重要的参数,其中邻近效应是计算交流电阻的一部分。
Because of high-frequency effects (namely skin effect and proximity effect), the current flowing through those windings may be not equally divided among them, resulting in high ac resistance.
由于电磁场的高频效应(集肤效应和邻近效应),可能导致电流在各并联绕组层中不均分,产生较高的交流电阻。
Due to its proximity effect and skin effect, induction heating is only the workpiece near the outer skin penetration depth of a layer of fixed value of the direct heating, internal heating is small;
由于邻近效应和集肤效应的影响,感应加热时只是工件中靠近外表皮透入深度为定值的一层直接发热,内部发热很少;
Due to its proximity effect and skin effect, induction heating is only the workpiece near the outer skin penetration depth of a layer of fixed value of the direct heating, internal heating is small;
由于邻近效应和集肤效应的影响,感应加热时只是工件中靠近外表皮透入深度为定值的一层直接发热,内部发热很少;
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