A lithographic scanning apparatus includes a light projection device for seamlessly and uniformly projecting a scanning light onto a light exposing area.
一个平版印刷扫描设备包含一个用以无缝隙地，均匀地投射一扫描光到曝光区域上的光投装置。
A lithographic scanning apparatus includes a light projection device for seamlessly and uniformly projecting a scanning light onto a light exposing area.
一个平版印刷扫描设备包含一个用以无缝隙地，均匀地投射一扫描光到曝光区域上的光投装置。
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