Using high - power pulsed laser - produced plasma as soft X - ray source for approach lithography is described in this paper.
描述了用高功率脉冲激光打靶产生的等离子体作为软x射线源而进行的接近式软x射线光刻研究。
A laser-produced plasma soft X-ray-VUV source generated with low energy laser system has been designed.
设计了一种小型激光等离子体软X线-真空紫外光源。
A dye laser system used as a pulsed light source for picosecond photography of laser-produced plasma is described.
本文叙述了作为激光等离子体微微秒照相脉冲光源用的染料激光系统。
A dye laser system used as a pulsed light source for picosecond photography of laser-produced plasma is described.
本文叙述了作为激光等离子体微微秒照相脉冲光源用的染料激光系统。
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