The displacement sensor of Z axis adopts single point laser position detector PSD, and its resolution is about 10nm.
方向位移传感器采用激光单点位置探测器P SD,Z轴方向的位移测量精度达10纳米。
The displacement sensor of Z axis adopts single point laser position detector PSD, and its resolution is about 10nm.
方向位移传感器采用激光单点位置探测器P SD,Z轴方向的位移测量精度达10纳米。
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