In the first polishing step (S20), the compound semiconductor substrate is polished with a chloric polishing agent.

在第一抛光步骤(S20)中，用含氯抛光剂抛光该化合物半导体衬底。

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In the first polishing step (S20), the compound semiconductor substrate is polished with a chloric polishing agent.

在第一抛光步骤(S20)中，用含氯抛光剂抛光该化合物半导体衬底。

youdao