The device includes: an entrance slit (2), a concave grating (3), a optical fiber array (4) and a flat plate detector (5).
该装置包括：入口狭缝（2），凹面光栅（3），光纤阵列（4）和平板检测器（5）。
On basis of comparison with other types of detectors, we designed microchannel plate detector which is the most advanced detector for EBM up to now.
在与各种探测器比较的基础上，我们设计了微通道板探测器，它是目前用于电子束曝光机的最先进的探测器。
On basis of comparison with other types of detectors, we designed microchannel plate detector which is the most advanced detector for EBM up to now.
在与各种探测器比较的基础上，我们设计了微通道板探测器，它是目前用于电子束曝光机的最先进的探测器。
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