Moreover, the sensing mechanism of the Pirani sensor and the micro-scale thermal conduction of the gas in the silicon-based Pirani sensor have also been investigated in this work.
此外，本文也研究了传感器的敏感机理和硅微皮拉尼传感器中气体导热的微尺度效应。
The integrated Pirani vacuum sensor system in this work can be applied for the gas pressure detector in the medium and rough vacuum measurement.
本文研制的集成皮拉尼传感器系统能够作为气压检测器应用于中真空和粗真空的测量。
An integrated CMOS-compatible Pirani vacuum sensor system has been investigated and developed in this work, combining the traditional Pirani gauge with the MEMS technology.
本文将传统的皮拉尼计与MEMS技术结合起来，研制了一款与标准CMOS工艺兼容的集成皮拉尼传感器系统。
Supply : Pirani Vacuum Sensor & Vacuum Gauges.
提供皮拉尼真空规管、真空计等。
Supply : Pirani Vacuum Sensor & Vacuum Gauges.
提供皮拉尼真空规管、真空计等。
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