Because the utility model adopts the form of electron-acceleration of ion-ion bonding so as to cause ion flow collected by a base plate (a workpiece) is only 10 to 15 percent of target current.

由于本实用新型偏压采用电子—离子加速—离子结合形式，使基板(工件)所收集到的离子流是靶电流的10—15%。

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Because the utility model adopts the form of electron-acceleration of ion-ion bonding so as to cause ion flow collected by a base plate (a workpiece) is only 10 to 15 percent of target current.

由于本实用新型偏压采用电子—离子加速—离子结合形式，使基板(工件)所收集到的离子流是靶电流的10—15%。

youdao