Micro-electronic fabrication of optical spot array generator is studied, 1D and 2D optical spot array generator is designed and fabricated, and the property is analyzed.
研究了光阵列发生器的微电子加工工艺，设计并加工了一维和二维光阵列发生器，通过实验测试了其性能。
Micro-electronic fabrication of optical spot array generator is studied, 1D and 2D optical spot array generator is designed and fabricated, and the property is analyzed.
研究了光阵列发生器的微电子加工工艺，设计并加工了一维和二维光阵列发生器，通过实验测试了其性能。
应用推荐