Experiment on grating shows that the system meets the precision of nanometer and the need of nano-scratch testing.
初步实验表明：检测系统达到了纳米级精度，满足了划痕检测性能要求。
Hardness and scratch resistance were measured by nano-indentation and nano-scratch, respectively.
纳米压痕和纳米划痕硬度和抗划伤性测定，分别。
Hardness and scratch resistance were measured by nano-indentation and nano-scratch, respectively.
纳米压痕和纳米划痕硬度和抗划伤性测定，分别。
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