A semiconductor dynamic quantity sensor includes a semiconductor substrate that includes a movable electrode, a pair of first fixed electrodes, and a pair of second fixed electrodes.
半导体动态量传感器包括一个半导体基底,上面有可移动电极,一对第一固定电极,一对第二固定电极。
The movable driving electrode film is thinner than the movable contact electrode film.
所述可移动驱动电极膜比所述可移动接触电极膜薄。
The movable driving electrode film is thinner than the movable contact electrode film.
所述可移动驱动电极膜比所述可移动接触电极膜薄。
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