A new algorithm which is used to transform center-hollowed polygons of CIF format in microlithography pattern into rectangles of PG3600 format is presented.
给出了一种微光刻图形CIF格式的中间挖空多边形切割成PG 3600格式所需矩形的新算法。
A new algorithm which is used to transform center-hollowed polygons of CIF format in microlithography pattern into rectangles of PG3600 format is presented.
给出了一种微光刻图形CIF格式的中间挖空多边形切割成PG 3600格式所需矩形的新算法。
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