Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
DOE with high diffractive efficiency can be fabricated by laser aided fabrication technology LDWS (laser direct writing system), similar to the way manufacturing micro electronics.
采用类似于微电子加工手段的激光辅助制造技术——激光直写技术，可以制作具有高衍射效率的DOE。
The modal testing of vibration isolation system of the micro-manufacturing platform is made.
对微制造平台隔振系统进行了实验模态分析。
The modal testing of vibration isolation system of the micro-manufacturing platform is made.
对微制造平台隔振系统进行了实验模态分析。
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