According to the structure of micro bio-chemical analyzer, a new type of mini temperature-controlling system was designed, whose key component was a micro-heater chip made of silicon.
本文针对微型生化分析仪的结构特点，设计并制作了以硅集成加热芯片为核心元件的温度控制系统。
Meanwhile, it can also effectively reduce self inductance effect of the micro-heater and improve the heating efficiency.
同时该结构还能有效减小微加热器本身的自感效应，提高加热效率。
Using micromachining technology, we also integrated micro-heater and temperature sensor on the chip.
利用微加工技术，我们还将微加热器和温度传感器集成到本芯片上。
Using micromachining technology, we also integrated micro-heater and temperature sensor on the chip.
利用微加工技术，我们还将微加热器和温度传感器集成到本芯片上。
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