As a new micro fabrication technology, micro electroforming I.
微电铸，又称精密电铸，是一种全新的微细加工技术。
Micro electrochemical milling is proposed as a new method of micro fabrication.
对微细电解铣削加工技术进行了深入研究。
Handbook of Micro lithography, Micromachining, and Micro fabrication. Vol.1: microlithography.
微平版印术，显微机械加工，和微制作手册：卷一：微平版印术。
The experiment results indicate that the micro fabrication process is feasible whereby b...
实验结果表明此微细加工方法是可行的，从而开辟了微细加工的新途径。
A novel electro-thermal actuator is presented by using non-silicon micro fabrication technology.
介绍了一种由非硅微加工技术制作的电热微驱动器。
The fundamental theory-molecular biotechnology and micro fabrication technology was described in unison.
本文探讨了生物芯片两大理论基础- 分子生物技术和微细加工技术；
As a newly coming micro fabrication technology, soft lithography use elastomeric stamp to replace hard stamp in traditional lithography to fabricate micro patterns and structures.
作为一种新型的微图形复制技术，软光刻技术用弹性模替代传统光刻技术中使用的硬模来产生微形状和微结构。
The electronics industry is taking advantage of micro and nano-fabrication technology by using it in bio-technology sensing, optical filtering and light control components.
电子工业正利益于微米和纳米制造技术，将其应用在生物技术传感、光学过滤和灯光控制组件方面。
The results are helpful to the design, fabrication and application of the micro flapping actuator.
所得研究结论对微扑翼驱动机构的设计、制作和应用提供了一定的理论依据。
This paper is focused on developing micro electrochemical fabrication processes, including micro electroforming and micro electrochemical machining.
开展了微细电化学加工技术的试验研究工作，内容包括微细电铸和微细电解加工。
As the driver of the micro multi-rotor craft, the micro BLDC motor was of simple structure, easy fabrication, non commutation spark and so on.
作为多旋翼微直升机的驱动器，微型无刷直流电动机具有结构简单、制造方便、无换向火花等特点。
A method of photo-mask lithography for fabrication of micro Fresnel lenses Arraywas presented in this paper.
本文介绍用制版的方法制作的微菲涅耳透镜列阵及其成像实验。
With the rapid increase of market demand for micro parts, micro bending formation plays an important role in the fabrication of micro products.
微器件的市场需求急剧增加，微弯曲成形在微型产品的制造中起着至关重要的作用。
Fabrication of micro channels is a key technique for production of analysis chip.
微通道制作是微分析芯片制作中的关键技术之一。
This paper presents a novel method for the fabrication of micro electromagnetic relays based on MEMS technology.
本文探讨了一种基于MEMS技术的微型电磁继电器的制造工艺。
DOE with high diffractive efficiency can be fabricated by laser aided fabrication technology LDWS (laser direct writing system), similar to the way manufacturing micro electronics.
采用类似于微电子加工手段的激光辅助制造技术——激光直写技术，可以制作具有高衍射效率的DOE。
Research progresses of laser trimming, laser drilling, laser cleaning, laser flexible routing and laser micro welding applied in the IC fabrication and packaging are given.
介绍了在集成电路制造封装中采用的激光微调、激光打孔、激光清洗、激光柔性布线和激光微焊技术。
It indicates that laser micro-deposition of metallic powder has a bright prospect in laser surface modification of small parts and direct fabrication of fine and precise components.
结果表明，激光微沉积合金粉末技术在细小零件的激光表面改性及高精度小型零件的直接制备方面具有很好的应用开发前景。
A fabrication process has been developed to form a polymer micro tip arrays using micromachining.
采用微加工工艺制备出一种聚合物微锥阵列。
Abstract: the micro electrode array has wide used both in the micro-fabrication field and the life science field.
摘要：超高金属微细阵列电极在微细加工领域和生命科学领域有广泛应用。
Preparation of thermal sensitive thin film resistor is one of key technologies in uncooled micro bolometer IR FPA fabrication.
热敏薄膜电阻制备是非致冷微测辐射热计红外焦平面的一项关键技术。
Based on the applications in ultra-high-density data storage, a novel micro piezoelectric cantilever is designed, and the probe fabrication process arrangement is made as well.
以超高密度信息存储技术为应用背景，设计了低刚度高谐振频率的新型微压电悬臂梁探针，并安排了探针加工工艺流程。
The graded distribution of multi kind material components and the fabrication of inside micro scale structures are required in the manufacturing process of those devices.
功能结构器件的加工过程要求实现多种材料组分的梯度分布和内部微结构的构造。
The model of the Boron ion spread in wafer was analyzed by numerical simulation and the micro resistor fabrication conditions were optimized.
通过数值计算，建立了制备过程中硅基底中的硼离子的空间浓度分布的理论模型，优化了二次硼扩散工艺条件。
Biochip is a modern technology of micro-fabrication coupled with modern biotechnology. It is a microchip structure with specific biological functions.
生物芯片是现代微加工技术和生物技术的结晶是具有一定生物功能的微晶片结构。
Thee current research fields of the center are micro and nano fabrication technologies, micro and nano materials, and micro and nano systems.
中心的研究方向，主要从事微纳米加工技术、微纳米材料以及微纳米器件与系统的研究与应用，并为国内外产业及研究机构服务。
However nowadays it is still at the stage of exploring to utilize micro powder metal material for micro-fabrication.
而利用微纳粉末金属材料进行微成型目前尚处于探索阶段。
Based on the technology of micro-process and micro-fabrication, a micro hemoglobin sensor array is developed.
利用微加工和微装配技术研制了一种微型的阵列式血红蛋白传感器芯片。
A micro bridge calorimeter fabricated with silicon surface micro-fabrication technology is developed for testing heat capacity of thin films.
用表面硅微加工工艺研制了一种用于薄膜热容测量的新型微桥量热计。
A process of soft lithography was introduced for fabrication of PDMS (polydimethylsiloxane) micro-mixer on micro-fluidic chip.
介绍了一种用软光刻技术制作微流芯片上PDMS微混合器的工艺。
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