A set of data processing system of EFPI optical fiber micro displacement sensor is designed.
设计了一套EFPI光纤微位移传感器数据处理系统。
A laser micro displacement measuring system for measuring dynamic micro displacement is introduced.
介绍了一种可进行动态微位移测量的激光微位移测量系统。
The micro displacement technology is one of essential technology of the precision machinery and high accuracy instrument.
微位移技术是精密机械和仪器实现高精度的关键技术之一。
Used the phase of laser interference fringes, a simple, fast and accurate micro displacement measuring method is proposed.
利用激光干涉条纹的位相，提出了一种简便、快速且精度很高的微小位移的测量方法。
A micro displacement mechanism featured with high accuracy, high audio response and long travel is introduced in this article.
介绍一种在高精度下兼有高频响和大行程特性的微位移装置。
In the case of micro displacement technology, the flexure hinge is an ideal mechanism to realize the micro displacement and high resolution.
在微位移技术中，柔性铰链是实现微位移和高分辨率的理想机构。
There is the micro displacement mechanism equipped with inner micro sensors in the module, which integrates mechanism, actuator and sensors.
驱动器内部藏有电阻应变式角位移传感器，具有机构、驱动、检测一体化的特点。
This paper presents the construction method and characteristic error calculation of the elastic leaf spring guide in a micro displacement worktable.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
This paper presents the structure, the principle and the designing and calculation method of the micro displacement worktable which has six degrees of freedom.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
The measuring results for the micro displacement and the strain indicate that the optic fiber strain gauge offers a monitoring method both strain and distortion.
通过微位移架上的位移测量实验与悬臂梁上的应变测量实验，结果表明该光纤应变片提供了同时适合于应变与形变的检测方式。
The principle, structure, design and calculating methods on micro displacement worktable with three degrees of freedom supported by elastic guides are presented.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
Using micro displacement mechanisms and divided drive manner under the control of a computer by means of search skills, the test work is done with great facility.
该装置的特点：采用多个微动机构，在微机控制的细分驱动方式下，利用搜索逼近的方法完成对楔角的测量。
The friction drive mechanism moves well even when driven at high frequency and with long strokes, so it can be used with open-loop control systems for micro displacement.
进给速度可通过改变驱动脉冲的频率调节，机构在高频驱动大位移动作时亦表现出准确的步进特性，可用于小型机电系统的开环进给驱动。
Variable-gapcapacitance sensor has high sensitivity, specially applying to non-contact measurement of micro displacement, and slightly affecting the system to be measured.
变气隙式电容传感器具有灵敏度高、特别适用于微小位移的非接触测量，对被测系统影响小。
Then the techniques about actuators, micro displacement sensors, and micro force sensors were discussed and compared respectively as they were main parts in microscale mechanics testing.
阐述了微构件力学性能的研究现状与存在的力学性能参数表征问题，而后重点介绍了微构件力学性能测试中相关的驱动方式、微位移检测和微力检测技术。
Based on the principle of micro displacement of piezoelectric ceramic, the research on the precise actuator technique is presented, which is used for precise positioning work piece stage.
以压电陶瓷微位移原理为基础，对精密驱动技术在精密定位工件台上的应用作了实验研究。
A high precision three-dimensional micro displacement test platform was set, and the measuring range, linearity and displacement error of the probe were tested and verified by experiments.
搭建了高精度三维微位移测试平台，对测头的测量范围、线性、位移误差进行了实验验证。
The system can be used in installing and debugging the disc and also in measuring the micro displacement of the object, the surface shape and thickness of the object, so it has fairly applied value.
本系统除可用于码盘的安装调试外，还可测量物体微位移、物体表面形貌及物体厚度，有很大的实用价值。
Then, PZT piezoelectric ceramics sensor's probe is contact with the center of diaphragm, if we use the uniform load model to calculate and analyze, it will cause error in micro displacement detection.
此时，压电陶瓷PZT的探针是抵在传感器膜片的中心点处，如果使用均布载荷模型进行计算和分析，将会产生较大的误差。
In this design and implementation of an inductive micro-displacement meter and digital indicator are presented.
本文介绍了一种电感式微位移测量仪和数字显示仪的设计与实现。
We also presented the design fundamentals for micro-displacement amplifier, and the necessity of reasonable design for micro-displacement amplifier has been illuminated by practical application.
提出了微位移放大机构设计的原则，通过实例说明了位移放大机构合理设计的必要性。
CCD micro-displacement measuring system is an ultra high accuracy non-contact laser displacement device on the basis of trigonometry theory.
CCD激光微位移测量头是利用三角法原理设计的一种高精度非接触激光微位移传感器。
The experiment came into use single light path critical angle method, output signals were detected by four-quadrant receiver, micro-displacement drive element were piezoelectric ceramics.
实验采用单光路临界角法，用四象限探测器探测输出信号，物面微位移采用压电陶瓷作为驱动元件。
For improving accuracy of the micro-displacement detection in stiffness measurement, this paper presents an image micro-displacement detection method.
为提高刚度测量中位移检测的精度，提出一种图像式微位移检测方法。
The operation principle of a liquid crystal micro-displacement sensor is based on the dynamic scattering effect in the negative dielectric anisotropic nematic liquid crystal.
液晶微位移传感器的工作原理是以负介电各向异性的向列相液晶材料的动态散射效应为基础的。
An optical micro-displacement measurement method based on elliptic spot and off-axis principle is proposed.
提出一种基于离轴法并采用椭圆光斑的光学微位移计量手段。
A design method of micro-displacement amplifier in a novel piezoelectric servo was proposed based on stiffness analysis of flexure hinges.
针对一种新型压电舵机的微位移放大机构，提出一种基于刚度分析的设计方法。
These excellent single crystals, possessing a large displacement output under low magnetic field, build a foundation for the fabrication of the high precision micro-displacement actuators.
单晶材料消除了晶界对畴壁移动的影响，具有很好的低场下的位移输出能力，这为微位移致动器的研制奠定了很好的基础。
The application of a low-voltage micro-displacement driving circuit and its control method on an optoelectronic profilometer are discussed.
讨论了低压微位移驱动电路及控制方法在光电轮廓仪上的运用。
This article main discuss the measuring the micro-displacement of the object, and we design a new setup to measuring the displacement and the titling factor in one time .
本论文主要讨论了分数傅里叶变换在测量物体微位移方面的应用，提出了一种可同时提取物体的面内位移和倾斜的信息的方法并设计了实验方案和装置。
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