Vibration of a micro beam structure under the nonlinear electric field force in MEMS is studied.

研究微机电系统(MEMS)中微梁结构在非线性电场力下的振动问题。

youdao

Vibration of a micro beam structure under the nonlinear electric field force in MEMS is studied.

研究微机电系统(MEMS)中微梁结构在非线性电场力下的振动问题。

youdao