This article mainly explains the process of LIGA technology, which includes X-ray mask lithography, Micro-electroforming and Micro-copy.
本文主要阐述了LIGA技术的工艺过程，包括X射线深层光刻、微电铸和微复制工艺。
Because the height of micro tips on cathode surface can be eroded by the negative current, surface finishing is better in the micro-electroforming by periodic reverse pulse current than pulse current.
由于负向电流可以腐蚀削减铸层表面微观突起的生长高度，因此周期换向脉冲电流微电铸与单向正脉冲电流微电铸相比更易获得较好的铸层均匀性。
This paper is focused on developing micro electrochemical fabrication processes, including micro electroforming and micro electrochemical machining.
开展了微细电化学加工技术的试验研究工作，内容包括微细电铸和微细电解加工。
The prototype of the micro actuator is fabricated by means of micro electroforming and SU-8 photolithography techniques.
利用SU-8光刻胶制备电铸模和微电铸工艺，制造了二维微执行器原型。
As a new micro fabrication technology, micro electroforming I.
微电铸，又称精密电铸，是一种全新的微细加工技术。
The micro-hardness of heat treated nano-composite electroforming deposits prepared under pulse current is markedly increased owing to the re-strengthening effect.
由于再强化效应的作用，经过热处理后的纳米复合电铸层，尤其是由脉冲电沉积所得纳米复合电铸层，其显微硬度的提高程度尤为明显。
Then, a micro exhaust duct was etched on an electroforming deposit through mask etching technology.
然后利用掩膜腐蚀方法在铸层上腐蚀出微排气通道。
Then, a micro exhaust duct was etched on an electroforming deposit through mask etching technology.
然后利用掩膜腐蚀方法在铸层上腐蚀出微排气通道。
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