Micro-patterning of PZT thin film is one of the key technologies in the fabrication of micro-sensors and micro-actuators made of PZT films.
PZT薄膜的微图形化是制备基于PZT薄膜微传感器和微驱动器的关键技术之一。
This mechanism can be replaced by micro actuators or other control strategies in the future.
在将来，这个机械装置也许会被其他微执行器或者控制策略代替。
With electromagnetic, electrothermal, and electrostatic micro actuators, this bistable structure can be applied to permanent magnet bistable MEMS relay.
此双稳态机构可与电磁驱动、电热驱动和静电驱动等类型的微驱动器联用构成永磁双稳态MEMS微继电器。
As a kind of MEMS actuators, micro mechanical radio frequency switch is a representational structure of micromechanical technology, and basis of many micro mechanical components.
微机械射频开关作为MEMS执行器的一种，是微机械技术中的一类有代表性的结构，是很多微机械器件的基础。
It is significant for the architecture design and the selection of the actuators to research statics of a micro-motion manipulator.
微操作机器人的静力分析对其结构设计和驱动器的选择有重要意义。
The paper introduces some applications of micro actuators according to the different drive modes.
根据微执行器的驱动方式的不同，对微执行器的应用进行了介绍。
At present, the Micro-Electro-Mechanical System (MEMS) is widely applied as the actuators and sensors in the aeronautics and astronautics.
目前，微机电系统(MEMS)作为致动器和传感器已被广泛应用于航空航天领域中。
These excellent single crystals, possessing a large displacement output under low magnetic field, build a foundation for the fabrication of the high precision micro-displacement actuators.
单晶材料消除了晶界对畴壁移动的影响，具有很好的低场下的位移输出能力，这为微位移致动器的研制奠定了很好的基础。
These excellent single crystals, possessing a large displacement output under low magnetic field, build a foundation for the fabrication of the high precision micro-displacement actuators.
单晶材料消除了晶界对畴壁移动的影响，具有很好的低场下的位移输出能力，这为微位移致动器的研制奠定了很好的基础。
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