To achieve co-implantation without additional ion sources, the required implants are mixed to form a cathode of MEVVA ion source.
将不同单质机械混合，在不增加注入机离子源数目的基础上实现了不同离子的共注入。
According to the features of the MEVVA ion source which produces multiple charged silver ions, the present results are discussed and compared with those from literatures.
根据MEVVA离子源产生多电荷态银离子的特点，讨论了本实验研究的结果，并与文献的结果进行了比较。
Phase transition, enhanced diffusion and Y-Al alloy formation are studied using Y implantation with high current extracted from metal vapor vacuum arc (MEVVA) ion source.
利用金属蒸汽真空弧（MEVVA）源所产生的强束流离子注入铝研究了相变、增强扩散和钇铝合金的形成条件。
Phase transition, enhanced diffusion and Y-Al alloy formation are studied using Y implantation with high current extracted from metal vapor vacuum arc (MEVVA) ion source.
利用金属蒸汽真空弧（MEVVA）源所产生的强束流离子注入铝研究了相变、增强扩散和钇铝合金的形成条件。
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