According to the requirement of the MEMS test, a MEMS testing system using computer microvision was developed.
根据MEMS测试的要求，设计并实现了一种基于计算机视觉的MEMS测试系统。
Therefore, it's very important of micro adhesion testing technology in studying adhesion problem of MEMS.
因此，对于MEMS粘着问题的研究，微观粘着测试技术显得极为重要。
Based on machine micro-vision dynamic testing system for MEMS, the technique of blur image synthesis is presented to exact and analyze in-plane motion characteristic of MEMS devices.
基于机器微视觉的MEMS动态测试系统，利用模糊图像合成技术对MEMS的平面微运动特性参数进行提取和分析。
Based on MEMS dynamic testing system this paper designs a set of stroboscopic driving circuits to acquire clear image of high speed MEMS device.
本文基于机器微视觉的MEMS动态测试系统，设计了一套频闪驱动电路，用于采集高速运动的MEMS器件的清晰图像。
This paper designs a set of MEMS dynamic testing system based on machine micro-vision.
本文设计了一套基于机器微视觉的MEMS动态测试系统。
MEMS dynamic testing system based on stroboscopic microscopic interferometry is introduced. The algorithm of data analyzing is developed.
介绍了基于频闪显微干涉技术的MEMS动态测试系统的测量原理，设计了数据分析处理算法。
Among those, testing technique of dynamic characterization has the most important significance in the course of research and development of MEMS.
其中动态特性测试技术在MEMS研发过程中具有最为重要的意义。
In general, MEMS devices are mm size in overall and um size in local. Thus, the testing technical is required to have high spatial resolution and large field of view.
一般来说，MEMS器件具有毫米级的整体尺寸和微米级的局部尺寸，因此，测试技术要求尽可能同时具有大视场、空间分辨率高的性能。
Testing technique based on MEMS mainly includes testing technique of material characterization, dynamic characterization and reliability characterization.
基于MEMS的测试技术主要有MEMS材料特性测试技术、MEMS动态特性测试技术、MEMS可靠性测试技术等方面。
Image processing method is used to carry out frequency sweep and voltage sweep measurement. The in-plane motion characteristic of MEMS is obtained and the testing results are analyzed and discussed.
利用图像处理方法对MEMS谐振器做扫频和扫压测量，获得了MEMS器件的平面微运动特性，并对测量结果进行了分析和讨论。
Image processing method is used to carry out frequency sweep and voltage sweep measurement. The in-plane motion characteristic of MEMS is obtained and the testing results are analyzed and discussed.
利用图像处理方法对MEMS谐振器做扫频和扫压测量，获得了MEMS器件的平面微运动特性，并对测量结果进行了分析和讨论。
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