Stability: 6 DOF motion measurement and control, the use of high-performance MEMS sensor technology, impact resistance, low drift.
稳定：6自由度运动测控，采用高性能MEMS工艺传感器，抗冲击、低漂移。
OMRON is a strong player in MEMS sensor technology with over twenty years of research, development and manufacturing experience in the healthcare and industrial markets.
欧姆龙是一家实力雄厚的MEMS传感器技术研发公司，在医疗保健和工业市场积累了二十余年的研发和制造经验。
The paper mainly introduced a new MEMS sensor of oil exploration, characters of MEMS sensor structure, medium material and sealed form as well as already reached technical indexes.
本文主要介绍了一种新的石油勘探MEMS传感器的结构特点、介质材料以及封装方式，并详细地介绍了该产品的主要技术指标。
This paper introduces application of MEMS Sensor in fuzes and analyzes the performance figures of various MEMS Sensors according to the operating requirements and conditions of fuze system.
介绍微机电传感器在引信中的应用，根据引信的使用条件和使用要求，对各种微机电传感器的性能指标进行了分析。
By the research for MEMS and the MEMS acceleration sensor, This assignment will finish a series of MIMU system, which will be applied to the rocket and the missile guided system.
该课题希望通过对MEMS技术和MEMS惯性传感器的研究，研制和设计出一系列能够应用于火箭和导弹制导的MIMU系统。
This paper introduces the design of MEMS accelerometer based on the acceleration sensor chip ADXL250 and the related calibrating circuit.
本文介绍了加速度传感器芯片adxl250在设计导航系统中的加速度计方面的一个应用。
This design proposal of micro pressure sensor array can effectively meeting the measuring requirement of boundary - layer separation point, and expand engineering applied scope of MEMS devices.
设计的微型压力传感器阵列可有效满足边界层分离点的检测要求，进一步拓展了MEMS器件的工程应用范围。
Some prototype of MEMS micro sensor, and library structure and key parameters of the built IP cell are introduced.
本文描述了已建立的MEMS微传感器件IP库单元的原型及库单元的结构和关键参数。
With the development of sensors technology, Micro-Electro-Mechanism System(MEMS), modern networks and wireless communication technology, wireless sensor network (WSN) comes out and develops gradually.
无线传感器网络随着传感器技术、微机电系统、现代网络和无线通信等技术的进步孕育而生。
This task adopt MEMS technics to make Thermal -film air-mass sensor, mostly work is the study and facture of the sense organ of the chip.
本课题采用MEMS工艺制作热膜式气体质量流量传感器，主要工作放在敏感头芯片部分的研制。
A novel thin-film MEMS microwave power sensor is presented.
提出了一种新型的MEMS微波功率传感器。
This paper is to research and design the low-pass filter of the MEMS capacitive accelerometer sensor readout circuit.
本文研究设计了适于MEMS电容加速度传感器读出电路的低通滤波器。
High-g MEMS accelerometer sensor is the key device for measuring acceleration during high shock process.
高量程MEMS加速度传感器是测量高冲击过程的核心器件。
MEMS mechanical quantity sensor is of characteristics such as small volume, light weight and high output sensitivity, and it is especially suitable for study of real-time shape of ocean waves.
MEMS力学量传感器具有体积小、重量轻和输出灵敏度高等特点，特别适合于对海浪实时形态的研究。
An integrated CMOS-compatible Pirani vacuum sensor system has been investigated and developed in this work, combining the traditional Pirani gauge with the MEMS technology.
本文将传统的皮拉尼计与MEMS技术结合起来，研制了一款与标准CMOS工艺兼容的集成皮拉尼传感器系统。
The infrared gas sensor contains an open-path gas chamber, a high SNR (signal to noise ratio) infrared detector, and an electrical modulated MEMS infrared emitter.
红外气体传感器采用开放式气室，选用高信噪比的探测器和电调制的MEMS红外光源。
Different kinds of MEMS devices and systems were born in succession along with the development of MEMS technology quickly. One of them was MEMS gas sensor.
随着MEMS技术的飞速发展，各种MEMS器件和系统相继问世，MEMS气敏传感器是其中之一。
MEMS systems are more and more popular nowadays, and they made it possible that more intelligent sensors are produced, and this made wireless sensor networks get more and more attention.
微机电系统(MEMS)越来越广泛的应用促进了更智能化的传感器的产生，这使得无线传感器网络在近年来获得了越来越多的关注。
The thermal conductivity sensor integrating MEMS and semi-conductor technique can effectively enhance the measuring precision and reliability of the instrument.
本实用新型采用运用MEMS技术和半导体工艺集成而成的热导传感器，有效提高了测量精度和可靠性；
An integrated microstructure PCR-DNA amplification biochip based on MEMS technology was fabricated, which includes heater, temperature sensor, reaction chamber and inlet channels.
基于MEMS技术研制了微结构的集成PCR-DNA分子扩增生物芯片，芯片集成了加热子、温度传感器、反应室、进样通道等；
An online type microwave power sensor structure is presented based on MEMS technology. The theory, design, fabrication and measurement are given.
提出了一种基于MEMS技术白勺在线式微波功率传感器构造，并对该构造停止了理论分析、设计、制作和测量。
The optical system of the micro digital sun sensor consists of APS CMOS image sensor and MEMS based diaphragm with pinhole array structure.
微型数字式太阳敏感器光学系统由APSCMOS图像传感器和基于MEMS工艺的小孔阵列式光线引入器组成。
A silicon piezoresistive pressure sensor based on MEMS technology SP12 is applied to be a unit in the tire pressure monitoring.
采用了基于MEMS技术的硅压阻式压力传感器SP12作为轮胎压力的检测单元，PIC16F628A作为信号控制处理与发射单元。
Miniature silicon resonant pressure sensor based on MEMS, which has the highest precision for frequency output, measures pressure by detecting the natural frequency of some object.
基于MEMS技术的硅微谐振式压力传感器是目前精度最高的硅微压力传感器，它通过检测物体的固有频率间接测量压力，为准数字信号输出。
Aim at the disadvantage of traditional sensor for structural health monitoring for long, a new type of micro capacitive sensor based on MEMS is developed.
针对传统的传感器无法进行长期健康监测的不足，研发出一套新型的基于MEMS的硅微电容式传感器。
Comparison of the MEMS-based capacitive pressure sensor with a general structure sensor, the output linearity of the proposed sensor has been improved by 48.38%, reaching 1.6%.
分析结果表明，与常规的双极板微型电容式压力传感器相比，新型结构压力传感器的线性度改善了48.38%，达到了1.6%。
MEMS pressure sensor, with many extra benefits, is more advisable to be applied in petrochemical industry than conventional pressure sensor.
微压力传感器具有许多传统压力传感器不具备的优点，能够满足石化行业对压力传感器的要求。
The sensor was fabricated on ceramic substrate, using two step MEMS lift-off processes.
传感器芯片在玻璃衬底上采用两步mems剥离工艺加工，加工工艺简单可靠。
A new structure MEMS thermal flow sensor combining two principles of temperature-difference and anemometer is designed and manufactured.
在器件结构上结合了温差式和风速计式两种检测原理，设计并制造了一种新型结构的MEMS热式流量计。
A new structure MEMS thermal flow sensor combining two principles of temperature-difference and anemometer is designed and manufactured.
在器件结构上结合了温差式和风速计式两种检测原理，设计并制造了一种新型结构的MEMS热式流量计。
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