The principle, advantages and disadvantages, machining precision, and applications of MEMS processing technology are described.
阐述了这些MEMS加工技术的工艺原理、优缺点、加工精度、应用等。
Using IC-compatible silicon as substrate and MEMS processing technology, it is fabricated with silicon wet etching and SU8 micro reaction pool.
以与IC兼容的硅作为基底材料，利用MEMS加工工艺，采用硅腐蚀及SU8微反应池方法制成了新型微电极传感器。
Several typical silicon based MEMS processing technologies and applications are introduced, and the development tendencies of MEMS processing technology are prospected.
介绍了几种典型的硅基MEMS加工技术以及应用，并简单展望了MEMS加工技术发展趋势。
Several typical silicon based MEMS processing technologies and applications are introduced, and the development tendencies of MEMS processing technology are prospected.
介绍了几种典型的硅基MEMS加工技术以及应用，并简单展望了MEMS加工技术发展趋势。
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