A kinematics solver in MEMS virtual running as a import component of part-library based MEMS design system was proposed.
介绍了基于部件库的MEMS设计系统中虚拟运行的运动规律求解器。
Studying the test method for mechanical properties of MEMS materials is the key related to solve the MEMS design, manufacturing, quality control and appraisal.
研究微材料机械力学性能的测试方法是解决MEMS设计、制造、质量控制与评价的关键环节。
To enhance the effect of simulation on MEMS design, this paper introduces a collaborative design into MEMS design and proposes the collaborative simulation of MEMS.
为了充分发挥仿真在MEMS设计中的作用，把协同设计的思想引入MEMS仿真中，提出了协同仿真的设计方式。
Internal stresses in micromachined thin films have a great influence on the properties of MEMS devices. Measurement of stresses in the films is critical for process monitoring and MEMS design.
微机械薄膜应力对MEMS器件有较大的影响，因此应力测量对于工艺监控和MEMS器件设计是必须的。
Firstly, the concept of parts and part library are summarized; then, the overall structure and the critical technology of the environment of part library based method of MEMS design are introduced.
介绍了部件及部件库的概念和基于部件库的MEMS设计环境的总体结构及关键技术。
The main design method and the application in the AMB of MEMS are studied in detail. Finally, the main problems and the development trend of MEMS are indicated.
主要讨论了微机电系统主要的设计方法以及微机电系统技术在磁力轴承中的应用，最后指出了目前微机电系统技术所面临的主要问题及其发展趋势。
In the design and fabrication of MEMS devices, MEMS fabrication process based on Silicon is a main technology, to which is deeply paid attention by researchers and industries.
在MEMS器件的设计与加工过程中，键合技术是体硅工艺的一项关键技术。
In the design of MEMS, the resolution model of every essential device, the accurate numeric analysis and calculation are required to achieve more precise and rational analyzed results.
在MEMS器件设计中，综合各基本器件的精确分析结果，才能保证设计的合理性与准确性，这就需要建立器件的解析模型，并能够对其进行精确的数值分析与计算。
In this paper, we introduce some basic conceptions of RF MEMS switch such as the switch parameters, classification, typical fabrication process and design considerations.
本文着重介绍了RFMEMS开关的基本参数、分类以及典型制造工艺和设计时考虑因素等一些基本的概念。
As air damping directly determines the dynamic performance of MEMS, it is very important to estimate the air damping effects on them in the design process.
对空气阻尼进行定性和定量分析是MEMS器件设计中非常重要的一个步骤，直接影响MEMS器件的动态性能。
Expansibility is a very important performance for the design of MEMS optical switch array.
在MEMS光开关阵列设计中，扩展性是一项非常重要的指标。
To improve the performance of MEMS micro tactile probe, the structure design and parameter optimization of probe are developed.
为了提高MEMS微接触式测头的性能，系统开展了测头的结构设计和参数优化。
This paper introduces the design of MEMS accelerometer based on the acceleration sensor chip ADXL250 and the related calibrating circuit.
本文介绍了加速度传感器芯片adxl250在设计导航系统中的加速度计方面的一个应用。
Many MEMS run on the basis of thermal principles, so it is necessary to know their thermal characteristics, especially temperature distribution, during design and evaluation.
微电子机械系统（MEMS）的很多器件均凭借热工作原理，在其设计、性能评估中都需要了解热特性，特别是温度分布的动静态特性。
This dissertation aims to solve two key problems on optimizing design of mechanism and driving technique for the development of a test instrument for measuring mechanical properties of MEMS materials.
本文的研究目的是为一种MEMS材料力学性能测试仪的研制解决机构优化设计和驱动技术两大关键问题。
Computer aided design (CAD) of Microelectromechanical systems (MEMS) is a significant foundation for commercialization of MEMS.
微机电系统(MEMS)的计算机辅助设计(CAD)是MEMS实现商品化的重要基础。
The design and fabrication of a capacitive series RF MEMS switch is reported.
介绍了一种串联电容式RFMEMS开关的设计与制造。
This paper is to research and design the low-pass filter of the MEMS capacitive accelerometer sensor readout circuit.
本文研究设计了适于MEMS电容加速度传感器读出电路的低通滤波器。
The proposed design process can also be used in development of other static electricity driving devices, such as RF-MEMS.
所提出的设计开发流程也适用于静电驱动的其他器件的开发，如RF - MEMS器件。
With the maturing design of micro electrical mechanism systems (MEMS), the metrology for MEMS is becoming the hot research in the micro system technology.
随着微机电系统(MEMS)设计日趋成熟，度量问题越来越成为微系统技术中的热点。
This paper describes a design solution of automatic calibration platform based on MEMS accelerometer.
介绍了一种基于MEMS加速度传感器的自动校准平台的设计方案。
A design of reconfigurable rectangular slot ring antennas with MEMS switches is proposed in this paper.
提出一种基于MEMS开关的可重构矩形缝隙环天线设计。
The results can provide the means of analysis and design for the mechanism design and performance analysis of MEMS .
这些研究成果为微机械的结构设计、性能分析和制造工艺提供磨擦学的基本分析设计方法。
RF MEMS switch is designed by computer aided design (CAD) method.
应用计算机辅助设计(CAD)方法模拟设计一种射频微机械(RF - MEMS)开关。
In recent years, the rapid growth of wireless communications, MEMS, embedded technologies laid a good foundation for the research and design of animal-robots remote control system.
加之近年来无线通信、微机电、嵌入式等技术的飞速发展为动物机器人遥控系统的研究设计奠定了良好的基础。
Micro Systems Engineering includes Micro Electro-Mechanical Systems (MEMS) and related equipment design, manufacture and package.
微系统工程包括微机电系统(MEMS)及相关设备的设计、制造和封装。
Compared with other maturity testers, this design has many features such as:we import the MEMS technology and make the system higher integration.
与其他西瓜成熟度检测仪相比，本设计的特点是：引入了MEMS技术使得系统的集成性更高；
By introducing the design of the force balance silicon accelerometer, this paper describes the ideas and methods of the MEMS products.
介绍了力平衡式硅加速度计的设计，勾画了MEMS产品的一般设计思路和方法。
This paper studies some key problems of the design of a human wireless endoscopic MEMS, such as the design of the power system, wireless transmission circuit, image capture and saving.
研究讨论了人体无线内窥微机电系统设计中的若干关键问题，包括电源系统的设计问题，无线发射电路的设计问题，图像采集与保存问题。
The design and development of MEMS material database provide a lot of theoretical and applied value for the industrialization of MEMS products.
同时，MEMS材料数据库的设计与开发对于实现微机电系统产品的设计开发，实现产业化等具有重要的理论和应用价值。
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