By the research for MEMS and the MEMS acceleration sensor, This assignment will finish a series of MIMU system, which will be applied to the rocket and the missile guided system.
该课题希望通过对MEMS技术和MEMS惯性传感器的研究，研制和设计出一系列能够应用于火箭和导弹制导的MIMU系统。
In the design of MEMS, the resolution model of every essential device, the accurate numeric analysis and calculation are required to achieve more precise and rational analyzed results.
在MEMS器件设计中，综合各基本器件的精确分析结果，才能保证设计的合理性与准确性，这就需要建立器件的解析模型，并能够对其进行精确的数值分析与计算。
The main design method and the application in the AMB of MEMS are studied in detail. Finally, the main problems and the development trend of MEMS are indicated.
主要讨论了微机电系统主要的设计方法以及微机电系统技术在磁力轴承中的应用，最后指出了目前微机电系统技术所面临的主要问题及其发展趋势。
In the design and fabrication of MEMS devices, MEMS fabrication process based on Silicon is a main technology, to which is deeply paid attention by researchers and industries.
在MEMS器件的设计与加工过程中，键合技术是体硅工艺的一项关键技术。
The results can provide the means of analysis and design for the mechanism design and performance analysis of MEMS .
这些研究成果为微机械的结构设计、性能分析和制造工艺提供磨擦学的基本分析设计方法。
The single axis table series rt 1100 is an accurate position rate system designed for the test and calibration of MEMS, gyros, accelerometers and inertial guidance systems.
单轴平台系列rt 1100是一个高精度位率系统，其设计宗旨在于测试及校正MEMS、陀螺仪，加速表和惯性制导系统。
In this paper, we introduce some basic conceptions of RF MEMS switch such as the switch parameters, classification, typical fabrication process and design considerations.
本文着重介绍了RFMEMS开关的基本参数、分类以及典型制造工艺和设计时考虑因素等一些基本的概念。
As air damping directly determines the dynamic performance of MEMS, it is very important to estimate the air damping effects on them in the design process.
对空气阻尼进行定性和定量分析是MEMS器件设计中非常重要的一个步骤，直接影响MEMS器件的动态性能。
Expansibility is a very important performance for the design of MEMS optical switch array.
在MEMS光开关阵列设计中，扩展性是一项非常重要的指标。
To enhance the effect of simulation on MEMS design, this paper introduces a collaborative design into MEMS design and proposes the collaborative simulation of MEMS.
为了充分发挥仿真在MEMS设计中的作用，把协同设计的思想引入MEMS仿真中，提出了协同仿真的设计方式。
This paper designs an etching system with constant temperature for etching process in MEMS manufacture.
本文设计了一个恒温腐蚀系统，用于微机械加工制作中的腐蚀工艺。
To improve the performance of MEMS micro tactile probe, the structure design and parameter optimization of probe are developed.
为了提高MEMS微接触式测头的性能，系统开展了测头的结构设计和参数优化。
This paper introduces the design of MEMS accelerometer based on the acceleration sensor chip ADXL250 and the related calibrating circuit.
本文介绍了加速度传感器芯片adxl250在设计导航系统中的加速度计方面的一个应用。
Studying the test method for mechanical properties of MEMS materials is the key related to solve the MEMS design, manufacturing, quality control and appraisal.
研究微材料机械力学性能的测试方法是解决MEMS设计、制造、质量控制与评价的关键环节。
A method for designing and fabricating a novel deformable mirror with large effective area is proposed on the basis of MEMS technology.
基于MEMS技术体硅工艺，提出一种新型大有效面积的连续变形反射镜的设计制造方法。
By introducing the design of the force balance silicon accelerometer, this paper describes the ideas and methods of the MEMS products.
介绍了力平衡式硅加速度计的设计，勾画了MEMS产品的一般设计思路和方法。
This design proposal of micro pressure sensor array can effectively meeting the measuring requirement of boundary - layer separation point, and expand engineering applied scope of MEMS devices.
设计的微型压力传感器阵列可有效满足边界层分离点的检测要求，进一步拓展了MEMS器件的工程应用范围。
After more than ten years' hard work, we have had the capability of researching and developing the MEMS inertia instruments.
经过十几年的努力攻关，目前我国已具备了自主设计、研制MEMS惯性仪表的能力。
Many MEMS run on the basis of thermal principles, so it is necessary to know their thermal characteristics, especially temperature distribution, during design and evaluation.
微电子机械系统（MEMS）的很多器件均凭借热工作原理，在其设计、性能评估中都需要了解热特性，特别是温度分布的动静态特性。
This paper studies some key problems of the design of a human wireless endoscopic MEMS, such as the design of the power system, wireless transmission circuit, image capture and saving.
研究讨论了人体无线内窥微机电系统设计中的若干关键问题，包括电源系统的设计问题，无线发射电路的设计问题，图像采集与保存问题。
According to the requirement of the MEMS test, a MEMS testing system using computer microvision was developed.
根据MEMS测试的要求，设计并实现了一种基于计算机视觉的MEMS测试系统。
Based on MEMS dynamic testing system this paper designs a set of stroboscopic driving circuits to acquire clear image of high speed MEMS device.
本文基于机器微视觉的MEMS动态测试系统，设计了一套频闪驱动电路，用于采集高速运动的MEMS器件的清晰图像。
A novel capacitive switches structure for the distributed RF MEMS phase shifters is presented based on the analysis of the operation principle.
通过分析MEMS电容开关的工作原理，设计出一种适合分布式射频MEMS移相器电路的新型电容开关。
This dissertation aims to solve two key problems on optimizing design of mechanism and driving technique for the development of a test instrument for measuring mechanical properties of MEMS materials.
本文的研究目的是为一种MEMS材料力学性能测试仪的研制解决机构优化设计和驱动技术两大关键问题。
Computer aided design (CAD) of Microelectromechanical systems (MEMS) is a significant foundation for commercialization of MEMS.
微机电系统(MEMS)的计算机辅助设计(CAD)是MEMS实现商品化的重要基础。
A micro sampling actuator driven by electromagnetic force is designed and fabricated by MEMS technology.
设计和采用MEMS工艺技术制作了一种由电磁驱动的微量取样执行器。
The design and fabrication of a capacitive series RF MEMS switch is reported.
介绍了一种串联电容式RFMEMS开关的设计与制造。
This paper is to research and design the low-pass filter of the MEMS capacitive accelerometer sensor readout circuit.
本文研究设计了适于MEMS电容加速度传感器读出电路的低通滤波器。
To solve the problem of MEMS vacuum package, vacuum resistance welding equipment, which contains resistance welding and vacuum system, was designed and manufactured.
为了解决MEMS器件真空封装难题，设计并研制了一台将电阻焊与真空系统集成于一体的真空电阻焊机。
A new polyimide (PI) -cantilever MEMS optical switch of electromagnetic actuation is proposed, and the structure of the optical switch is designed and simulated.
介绍了一种新型的聚酰亚胺(PI)悬臂梁式电磁驱动微机电系统(MEMS)光开关，并对其总体结构进行了设计与仿真分析。
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