Micro-electro-mechanical system(MEMS); Accelerometers; Microstructure; Stiffness; Force method; Principle of work and strain energy;

微机电系统；加速度传感器；微结构；刚度；力法；功能原理；

youdao

Micro-electro-mechanical system(MEMS); Accelerometers; Microstructure; Stiffness; Force method; Principle of work and strain energy;

微机电系统；加速度传感器；微结构；刚度；力法；功能原理；

youdao