The mechanism of W-CMP was analyzed, the slurry makes a dual function of chemical erosion and mechanical lapping, has an important influence on the polishing rate.
分析了W -CMP的机理，抛光液对W材料表面具有化学腐蚀和机械研磨的双重作用，对抛光速率有着重要的影响。
Vibration of lapping machine is an important influencing factor on the lapping quality of diamond cutting tools in mechanical lapping, especially in the precision lapping process.
研磨机床的振动是影响金刚石刀具机械研磨质量的重要因素，尤其在精密研磨工序。
Vibration of lapping machine is an important influencing factor on the lapping quality of diamond cutting tools in mechanical lapping, especially in the precision lapping process.
研磨机床的振动是影响金刚石刀具机械研磨质量的重要因素，尤其在精密研磨工序。
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