According to metrological characteristics of diffraction grating, the measurement error models are built up and the equations between installation and measurement errors of grating are deduced.
根据衍射光栅的计量特点,建立了正交衍射光栅测量误差模型,推导了光栅安装误差与测量误差之间的关系。
According to metrological characteristics of diffraction grating, the measurement error models are built up and the equations between installation and measurement errors of grating are deduced.
根据衍射光栅的计量特点,建立了正交衍射光栅测量误差模型,推导了光栅安装误差与测量误差之间的关系。
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