Surface roughness is an important parameter to reflect the micro-geometry in machine process, and also an important part of modern precise measurement technique.
表面粗糙度是机械加工中描述表面微观形貌非常重要的一个参数，表面粗糙度测量技术是现代精密测试计量技术的一个重要组成部分。
The excimer laser has important applications in micro-machine process, medicine and optical communication.
准分子激光在微机械加工，医学，光通讯中具有重要应用。
In this paper, we propose a new machine process sequencing problem with two objectives considering the operation flexibility.
在允许作业柔性加工的基础上，本文提出一种新的两目标机器加工排序问题。
Servo feed system affects not only the stability of machine tool, but also the response of machine tool. Efficient and stable servo feed system can improve machine process ability.
伺服进给系统不仅对机床的稳定性有影响，对响应性方面的影响也非常重要，高效、稳定的伺服进给系统能够很好的提高机床的加工性能。
Servo feed system affects not only the stability of machine tool, but also the response of machine tool. Efficient and stable servo feed system can improve machine process ability.
伺服进给系统不仅对机床的稳定性有影响，对响应性方面的影响也非常重要，高效、稳定的伺服进给系统能够很好的提高机床的加工性能。
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