Lithographic apparatus, device manufacturing method, and device manufactured thereby.
光刻装置，器件制造方法，以及由此制造的器件。
Lithographic apparatus, device manufacturing method, device manufactured thereby, and computer program.
平版印刷装置，器件的制造方法，由此制成的器件，和计算机程序。
Method of preparing a substrate, method of measuring, device manufacturing method, lithographic apparatus, computer program and substrate.
制备基底的方法，测量方法，器件制造方法，光刻装置，计算机程序和基底。
A method of calibrating a lithographic apparatus, an alignment method, a computer program, a lithographic apparatus and a device manufacturing method.
校准光刻装置的方法，对准方法，计算机程序，光刻装置和器件制造方法。
A method of simulating and optimizing lithographic process parameters is proposed based on the concept of effective time difference.
通过引入有效时差的概念，提出了一种可模拟光刻工艺参数间的相互关系及优化光刻参数的方法。
A novel in-situ non-flatness measurement method of wafer stage mirrors in a step-and scan lithographic tool is presented.
提出一种新的步进扫描投影光刻机工件台方镜不平度测量方法。
Protective cover for a lamp, set including a lamp and a protective cover, method of installing a source in a lithographic apparatus.
灯保护罩，含灯和保护罩的装置，光刻器械中安装光源的方法。
Fabrication process of polymer microlens arrays is introduced based on soft lithographic UV-molding replication method.
介绍了利用软刻蚀紫外模塑技术制作复制聚合物折射和衍射微透镜阵列的工艺过程。
An apparatus and method of reducing image artifacts on ink coverage areas of a lithographic printing plate are provided.
本发明提供了一种降低平版印刷版油墨覆盖区上图像伪影的设备和方法。
An apparatus and method of reducing image artifacts on ink coverage areas of a lithographic printing plate are provided.
本发明提供了一种降低平版印刷版油墨覆盖区上图像伪影的设备和方法。
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