A novel acceleration feedforward control strategy and a calibration algorithm on feedforward mass and motor constant were proposed for linear driving system.
针对直线驱动系统，提出一种新的加速度前馈控制策略及前馈质量与电机常数的校准算法。
The piezoceramics linear driving system of closed loop control combined with a raster rule of high distinguishability is applied in the machine to meet the demand of microfabrication.
该机床采用压电陶瓷直线电机和光栅尺构成高精密的伺服驱动系统来满足微细、高精度加工的要求。
The piezoceramics linear driving system of closed loop control combined with a raster rule of high distinguishability is applied in the machine to meet the demand of microfabrication.
该机床采用压电陶瓷直线电机和光栅尺构成高精密的伺服驱动系统来满足微细、高精度加工的要求。
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