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The Test Bench built for Wafer Focusing and Leveling Sensor is to measure and evaluate its performance.
硅片调焦调平测量系统测试平台用于对光刻机硅片调焦调平测量系统的性能进行检测。
youdao
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The Test Bench built for Wafer Focusing and Leveling Sensor is to measure and evaluate its performance.
硅片调焦调平测量系统测试平台用于对光刻机硅片调焦调平测量系统的性能进行检测。
youdao