Imaging technique, interferometric method and ellipsometry are used in the defect detection of the thin film.
在薄膜缺陷检测领域，成像技术，干涉测量，椭偏测量等一系列测量手段都得到了应用。
A simple interferometric method for measuring the linear electro optic coefficients of poled polymer films is described.
报道了一种测量聚合物薄膜电光系数的简单方法。
Error budget estimation about conventional centering method shows that it cannot be used to control the vertex off-centering error, so interferometric method was suggested.
通过估算顶点偏心在传统定心仪上的测量误差，可以发现传统定心仪很难达到控制目的，而干涉测量方法却能得到较高的准确度。
Using traditional interferometric method, as the germanium material is too soft to process, the surface form of the test piece may not meet the requirement for the measurement.
运用传统的干涉法检验光学材料的折射率均匀性时，由于锗晶体太软，表面不易加工，其表面面形难以满足测试要求。
Compared with general interferometric method, the modulation interferometry has an advantage of high precision.
与通常干涉仪测量方法相比，这种方法具有测量灵敏度高等优点。
Compared with general interferometric method, the modulation interferometry has an advantage of high precision.
与通常干涉仪测量方法相比，这种方法具有测量灵敏度高等优点。
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