The mathematical models of surface profile as well as dividing the instrument error and the measurement interference are established.
本文还建立了表面轮廓和分离表面轮廓测量干扰及仪器误差的数学模型。
A contact surface profile measurement system which is based on white-light interference measuring technique is proposed.
提出了一种基于白光干涉测量技术的接触式表面形貌测量系统。
A phase interference method, for measurement of the relative change of surface acoustic wave velocities, is presented.
本文提出了一种相位干涉法。用来测量表面声波速度的相对变化。
During the optical interference testing, the measurement accuracy of the tested surface is influenced by the system structure of interferometer, which will decrease the reliability of the measurement.
在干涉检验过程中，被检元件的面形误差检测精度受到干涉仪系统结构的影响，从而降低测量结果的可靠性。
During the optical interference testing, the measurement accuracy of the tested surface is influenced by the system structure of interferometer, which will decrease the reliability of the measurement.
在干涉检验过程中，被检元件的面形误差检测精度受到干涉仪系统结构的影响，从而降低测量结果的可靠性。
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