The experiment shows that the gas ion source provides obvious pulverization for metal particles.
实验结果表明：气体离子源具有明显的细化金属颗粒的作用。
ABSTRACT: in this paper a reactive ion plating method and system configuration of Gas ion source enhanced Magnetron Sputtering (GIMS) is presented in details.
摘要：本文详细介绍了气体离子源增强磁控溅射(气离溅射)反应离子镀膜技术和系统配置。
TITAN ion source is a new ion source which can produce strong metal and gas ion beam. Use.
TITAN离子源是一种新的能够同时产生强金属和气体离子束流的离子源。
In addition, the requirement of delivering 18o2 beams from the electron cyclotron resonance ion source can be satisfied by the obtained 18o2 gas.
此外，制得的气体能够满足电子回旋共振离子源提供18o重离子束的实验要求。
The negative ion element will become the gas source center and form an ejection in the process of evaporation of coating material, so decrease the damage threshold of the coatings.
并且提出负离子元素在膜料蒸发过程中形成气源中心，产生喷溅，从而使薄膜的损伤阈值降低。
The 4 MV electrostatic accelerator consists of four parts, a high voltage system, an ion source and beam transmission system, a control system and a gas system.
MV静电加速器由高压系统、离子源及束流系统、控制系统和气体系统四部分组成。
The 4 MV electrostatic accelerator consists of four parts, a high voltage system, an ion source and beam transmission system, a control system and a gas system.
MV静电加速器由高压系统、离子源及束流系统、控制系统和气体系统四部分组成。
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