In order to meet the requisition of preparing PS on large size silicon chip, primary study was performed on preparing PS by galvanic element method.
为了适应在大尺寸硅片上制备多孔硅的要求，对原电池法制备多孔硅进行了初步研究。
In order to meet the requisition of preparing PS on large size silicon chip, primary study was performed on preparing PS by galvanic element method.
为了适应在大尺寸硅片上制备多孔硅的要求，对原电池法制备多孔硅进行了初步研究。
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