By introducing the design of the force balance silicon accelerometer, this paper describes the ideas and methods of the MEMS products.
介绍了力平衡式硅加速度计的设计，勾画了MEMS产品的一般设计思路和方法。
The moment reactive coefficient is given, and the effect of moment reactive coefficient on expanding the measurement range and improving the accuracy of force-balance accelerometer is analyzed.
给出了反馈力矩系数，分析了力矩系数对提高加速度表量程和保证精度的作用。
The moment reactive coefficient is given, and the effect of moment reactive coefficient on expanding the measurement range and improving the accuracy of force-balance accelerometer is analyzed.
给出了反馈力矩系数，分析了力矩系数对提高加速度表量程和保证精度的作用。
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