In the wafer notch detecting part, edge flexion method is adopted to find the notch range, then calculating the notch center by means of arc fitting.
缺口检测先采用边缘变化率算法查找缺口范围，再通过圆弧拟合的方法求出缺口中心位置。
In the wafer notch detecting part, edge flexion method is adopted to find the notch range, then calculating the notch center by means of arc fitting.
缺口检测先采用边缘变化率算法查找缺口范围，再通过圆弧拟合的方法求出缺口中心位置。
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