A novel in-situ non-flatness measurement method of wafer stage mirrors in a step-and scan lithographic tool is presented.
提出一种新的步进扫描投影光刻机工件台方镜不平度测量方法。
Flatness measurement has always been in trouble because of limitation in instruments used and complicated data processing.
由于使用仪器和复杂的数据处理方法的限制，平面度测量一直是比较麻烦的工作。
In varying wrap Angle flatness measurement system, the value of wrap Angle has a direct influence on the mechanics status of transducers.
在变包角板形测量系统中，无辊环式板形辊上传感器受力状态与包角大小有直接关系。
A throughout investigation has been carried out on the flatness measurement system and flatness control system of a 1780 tandem cold mill.
深入研究了某厂1780冷连轧机板形控制系统的板形检测原理及控制方法。
In flatness measurement system, at the edge of shape meter sensor has the direct relation between forced condition and the coverage fraction size.
在板形测量系统中，板形辊边部传感器受力状态与覆盖率大小有直接关系。
Based on the theory of laser-distance measurement, this paper introduces the application of the DSP and CCD techniques in online flatness measurement of hot strip.
从激光位移测量原理出发，介绍了DSP和CCD技术在热连轧机带钢平坦度在线测量中的应用。
Brief introduction the composition about the flatness measurement instrument of the crystallitic vitreous panel. It is introduced to disposal to the measured data.
介绍自动检测微晶玻璃板材平面度装置的基本组成设备和检测数据的处理方法。
Brief introduction the elements about the flatness measurement instrument of the crystallitic vitreous panel. It is introduced to what to form and the arts and crafts process.
简介微晶玻璃板材平面度测试仪测试板材平面度的原理与组成的基本设备和测试的工艺过程。
According to the diagonal principle, this article described how to establish the mathematical model for the flatness measurement and evaluate the uncertainty in flatness measurement.
本文根据对角线评定方法，对平面度测量的数学模型及不确定度的评定进行了探讨。
Based on a comparison of various current flatness measurement methods, this paper proposes to utilize pneumatic measurement in the flatness measurement system for the brakes 'steel back.
文中详细分析了气动测量原理，比较了各种气动测量气路的优劣，确定了差压式测量气路。
The practical applications show that this model can be utilized in a flatness measurement system whose wrap angle is variable. At the same time , it provides a basis for flatness control.
经现场应用表明，该模型可用于无辊环式板形辊的变包角板形测量系统中，为实现精确的板形控制提供条件。
The work principle of laser flatness gauge for hot-rolling strip steel is introduced. The continuous and online measurement gauge and its system software are developed.
介绍了用于热轧带钢板形检测的激光平坦度仪工作原理，开发了平坦度在线连续测量仪及其系统软件。
Measurement of the flatness of rail hand been finished by the rail foot flatness measuring instrument, it shows that the device designed can achieve the measure of Smoothness of welded joints.
利用所研制的该平直度检测仪进行了钢轨焊接接头的平直度测量，应用表明：所研制的装置能够实现钢轨焊接接头的平直度测量。
Its very difficult to achieve the flatness detection of the large flat surface formed with several non-continuous vertical planes with traditional contact measurement.
传统的接触式测量方法很难实现由多个非连续铅垂面形成大平面的平面度的检测。
Laser flatness gauge is widely used in on-line measurement of the steel strip shape in hot rolling progress.
激光平坦度仪广泛应用于热轧带钢平坦度在线检测与控制。
When measuring flatness error in close way by pitch, usually the uncertainty of measurement result is independently estimated according to pitch points.
本文通过实例分析，指出用封闭法测平面度误差时，测量结果不确定度应该按相关计算法求得。
When measuring flatness error in close way by pitch, usually the uncertainty of measurement result is independently estimated according to pitch points.
本文通过实例分析，指出用封闭法测平面度误差时，测量结果不确定度应该按相关计算法求得。
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