In the part of EM calculation, three principal scattering mechanisms, including facet contribution, edge diffraction and multi-scattering, are studied in the dissertation.
电磁计算部分，本文主要考虑了表面贡献、边缘贡献以及多次反射贡献三种最主要的散射机理。
In the part of EM calculation, three principal scattering mechanisms, including facet contribution, edge diffraction and multi-scattering, are studied in the dissertation.
电磁计算部分，本文主要考虑了表面贡献、边缘贡献以及多次反射贡献三种最主要的散射机理。
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