The invention provides an ion pipe and ion beam extraction method, wherein the ion pipe is arranged with a plurality of ion beam extraction holes, so that the ion beam current density becomes uniform.
本发明提供一种离子管及离子束的引出方法，离子管排列有多个离子束引出孔，使得离子束电流密度变得均匀。
The invention provides an ion pipe with a plurality of ion beam extraction holes, so that the ion beam current density becomes uniform.
本发明提供一种排列有多个离子束引出孔的离子管，使得离子束电流密度变得均匀。
The invention provides an ion pipe with a plurality of ion beam extraction holes, so that the ion beam current density becomes uniform.
本发明提供一种排列有多个离子束引出孔的离子管，使得离子束电流密度变得均匀。
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