This paper gives the operation principle, the structure and the circuit system designs of the micromachined electrostatic servo accelerometer, and briefly describes its packaged sample.
本文详细介绍了微机械静电伺服加速度计的系统工作原理、结构和线路设计特点，并对其封装样品作了简要的叙述。
The effect of electrostatic force of the drive voltage on the accelerometer had been researched when the bias voltage polarity is positive-negative configuration.
前人在研究驱动信号对传感器的静电力效应时，用偏置电压极性为正—负配置的驱动信号进行研究。
The effect of electrostatic force of the drive voltage on the accelerometer had been researched when the bias voltage polarity is positive-negative configuration.
前人在研究驱动信号对传感器的静电力效应时，用偏置电压极性为正—负配置的驱动信号进行研究。
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