The copper electrode couple preparation step prepares the copper electrode couples with a plurality of micrometers of relative spacing by a yellow-light photolithography process.
铜电极偶制备步骤，为利用黄光微影制程制作出相对间距为数微米的铜电极 偶。
The invention provides a preparation method of a chip-typed air discharging protection component, comprising a copper electrode couple preparation step and a hollow air chamber preparation step.
一种芯片型空气放电保护组件的制备方法，包括有铜电极偶制备步骤以及中空气室 制备步骤；
The invention provides a preparation method of a chip-typed air discharging protection component, comprising a copper electrode couple preparation step and a hollow air chamber preparation step.
一种芯片型空气放电保护组件的制备方法，包括有铜电极偶制备步骤以及中空气室 制备步骤；
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