The experimental results of SDS-3 Ebeam lithography machine show that the aberrations of the electrostatic deflection are in the same order of the magnetic deflection.
由SDS-3电子束曝光机试验结果表明，复合静电偏转可以达到磁偏转相似的像差水平。
The experimental results of SDS-3 Ebeam lithography machine show that the aberrations of the electrostatic deflection are in the same order of the magnetic deflection.
由SDS-3电子束曝光机试验结果表明，复合静电偏转可以达到磁偏转相似的像差水平。
应用推荐