Using this method, the behavior equation of a capacitive micro pressure sensor is represented, then its reusable parameterized schematic-drive model is established coded by HDL (MAST).

针对电容式微型压力传感器，专门考虑膜片的空间连续行为以及结构、静电力的耦合作用，建立了包含接口电路在内的系统模型，据此进行了动态行为仿真。

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Using this method, the behavior equation of a capacitive micro pressure sensor is represented, then its reusable parameterized schematic-drive model is established coded by HDL (MAST).

针对电容式微型压力传感器，专门考虑膜片的空间连续行为以及结构、静电力的耦合作用，建立了包含接口电路在内的系统模型，据此进行了动态行为仿真。

youdao